美国原装派克小流量微型比例阀技术指导
优点：
• Mass Flow Control
• Proven performance tested to 10 million life cycles
• RoHS compliant
因此流量与重复度高，介质可选范围大。
Enables precise low flow (0 - 500 sccm)
小流量，2通常闭 (NC) 比例阀，
control for improved instrument accuracy
• Gas Chromatography
• Cleaned for Oxygen and Analytical Service use
• Mass Spectrometry
flow over a wide range of media
具有集成在内的热补偿，
• Thermally compensated to maintain precise
and serialization for performance traceability
• Pressure & Flow Control
• Computer automated calibration
概述：
for applications where precise control flow control is required
feedback to deliver optimal system performance.
precise flow control of gas in proportion to input current.
proportional valve is ideally suited for manufacturers
Together with its ability to provide precise control
of Gas Chromatography and Mass Spectrometry equipment.
The valve can be controlled with either DC current
or pulse width modulation along with closed loop
over a wide range of media, the VSO® Low Flow miniature
between 0 - 500 sccm. Like the VSO miniature proportional valve,
the VSO® Low Flow miniature proportional valve provides
The VSO® Low Flow valve provides enhanced flow control
