1794-OB8
1794-OB8
1794-OB8
（1）控制系统
有电气控制和射流控制两种，一般常见的为电气控制。它是机械手的重要组成部分，它支配着机械手按规定的程序运动，并记忆人们给与机械手的指令信息（如动作顺序、运动轨迹、运动速度及时间），同时按其控制系统的信息对执行机构发出指令，必要时可对机械手的动作进行监视，当动作有错误或发生故障时即发出报警信号。
（2）位置检测装置
控制机械手执行机构的运动位置，并随时将执行机构的实际位置反馈给控制系统，并与设定的位置进行比较，然后通过控制系统进行调整，从而使执行机构以一定的进度达到设定位置。
厦门泰尼电气有限公司
Q Q: 2917675397
联系人：小黄（销售代表）,手机：
传真： （备注01002收）
电话：
EMAIL：2917675397@qq.com
地址:厦门市海沧区滨湖一里7号2008室
ADRESS:Room 2008,No.7 buliding of
BingHuYiLi,HaiCangDistrict,XiaMen city,China
Rudolph MetaPulse XCu 200mm Metrology Tool
LAM Rittal Corp. AC Distribution Unit ES5984 New
KLA-Tencor CRS 3000 300MM COMPLETE SYSTEM
Tokyo Electron ACT 8 Process Block Robotics Arm
Tokyo Electron ACT 12 Process Block Robotic Arm 200mm
Nikon Card Cage Assy. APGCi 7500 RS013-497 working
Verteq 1800 SRD Tool 1800.6 1800-6AR working 200mm
CTI-Cryogenics High Capacity Compressor 0190-07137 new
TEL ACT 12 Wafer Edge Exposure
Tokyo Electron ACT 8 Wafer Edge Exposure(WEE) Prcss Stn
Shinwa Temperature & Humidity Controller T&H-ESA-8-T-01
Rudolph Technologies MetaPulse 200X Cu Metrology Tool
Rudolph Technologies Metrology Tool MetaPulse 200X Cu
Rudolph Technologies MetaPulse 200 Metrology Tool 200mm
Tokyo Electron ACT 12 Develop Process Station Right
Tokyo Electron ACT 12 Develop Process Station Left
Tokyo Electron ACT 8 Develop Process Station Left
Novellus Concept Two Altus Wafer Chamber CVD-W complete
Shimadzu Turbopump TMP-3403LMTC rebuilt 3620-00486
AMAT XR80 Implanter 300mm Wheel and motor 0020-99685
Tokyo Electron TEL ACT 12 Chemical
TEL ACT 8 SOG Coat Process Station Right Working
Tokyo Electron TEL ACT 8 Chemical Cabinet Working
Tokyo Electron ACT 12 Coat Process Station Right
Tokyo Electron ACT 8 Coat Process Station Left
Tokyo Electron ACT 8 Coat Process Station Right
LAM Research RBM AC Distribution Unit 1B02737G01 New
Lam 150mm Chamber Assy 8 ESC 38 853-080202R150 Rfrbshd
Ebara A10S Vacuum Pump rebuilt working
ENI Spectrum 5kW RF Generator B-5002 working 0190-27361
Yaskawa Linear Servo Motor SGLFW-1ZA200A-AC11 new
KLA-Tencor Surfscan 6220 Inspection Tool AS-IS
Lam 4420 Etcher Orbital Gas Panel Assy 853-024403-100
TEL ACT 8 SOG High Temp Hot Plate (HHP)
Therma-Wave Optiprobe OP2600B Used, AS-IS
Nikon S306 Scanner Wafer Chuck 300mm SRX4P KBB21341
AMAT IECP Main AC Cabinet 0190-01661 untested
Hitachi S-9300 SEM Electron Gun Assy. untested
LAM 4420 Etcher PCB Rack 853-017305-002 Working
Ecosys Novapure Resin Tank C3-0YN-C6-K2-H2 new
Ecosys Novapure S447D Scrubber Tank C5-YY0-B5-D5-NN new
Tokyo Electron ACT 8 Chill Plate Process Station (CPL)
Leybold UL 500 dry Helium Leak Detector
ATS M-Pak Temp. Control System Chiller MP40C-DI
Lufran DI Water Heater 052-RE-480-000-U-CAB working
TEL ACT 8 WEE X-Theta Drive Assy 200mm working
TEL Fujikin Water Vapor Gen. Controller WVG-S2-Y-IB7
TEL Fujikin Water Vapor Generator WVG-S2-Y-IB4 New
TEL Fujikin Water Vapor Generator WVG-S2-Y-IB7 New
TEL ACT 12 Adhesion Process Station 12" working
Materials Research Eclipse Star Chamber Assy. A119124
MRC Eclipse Star Chamber Assy. A120946
Buckley Systems Ltd. AMAT XR80 Beam Magnet working
Hamamatsu LC5 Dual Optical EBR System
Hitachi S-9300 SEM Transfer Robot
KLA-Tencor AIT 2 Measurement Head 0021726-001
AE Apex 5513 RF Generator 5.5kW 0190-11209
ENI OEM-12B3 3 Phase RF Generator 1250W new 0190-76006
Leybold Coolvac 1500 SemiLine Cryopump working
Electroglas Horizon 4085X Wafer Prober 200mm untested
Genmark Precision Automated Transfer Robot
Edwards iQDP80 Vacuum Pump QMB250 Blower,
MRC 200mm Eclipse Magnet Assy. A120364 new
Hitachi M-308ATE PCB Cage System Controller Module
Yashibi YCC-18K-X DC Pwr Supply 5kV 500mA Hitachi M-308
AMAT XR80 Implanter Gas Interface 9090-00106 ITL
ENI DCG-200Z DC Plasma Generator 10kW DCG-200
Raymond Pacer 60C40TT Stand Up Fork Lift 4000# 183" 36V
