接地是抑制噪声和防止干扰的重要手段，良好的接地方式可在很大程度上抑制内部噪声的耦合，防止外部干扰的侵入，提高系统的抗干扰能力。变频器的接地方式有多点接地、一点接地及经母线接地等几种形式，要根据具体情况采用，注意不要因为接地不良而对设备产生干扰。
MKS MANOMETER, TYPE 128, 128AA-00010B
Humphrey Solenoid Bank ST053101CJ-02
3 way/port valve
Futurestar FLOWMETER 5 GPM 1/2" Anolog Odyssey
Master Interface PCB w/optional Arcom 123626
Lambda LND X 152 12-15 Volt Regulated Power Supply 2.5A
APPLIED MATERIALS QUARTZ COVER 125mm POLY, 0200-10044
APPLIED MATERIALS Ring, top, 125 mm flat, 0200-00157
COORS Tek, SEMI WAFER. CEL 8.62, 41120-87756-010
Entegris Replacement element kit and wire guards 213-75
Entegris 3/4" PFA Hand Valve KC-201-41-01
Applied Materials Shield, Lower, 8", 0200-25077
Applied Materials Ring, Quartz, Pedestal, 0200-09217
TESTO MODEL 490 CALIBRATOR
