D791-5021 Moog
D791-5021 Moog 90-70系列到PACRX7i转换时也可能会产生一些执行差异。报告提供了一份对每个LD块的分析并且对不支持的指令，不支持的服务请求，故障定位变量使用作出报告D791-5021 Moog 。
AMAT 0050-35777 LINE ADPTR GATE VALVE
AMAT 0150-01735 CABLE ASSY. MANOMETER, 300MM
AXCELIS APERTURE, EXTENSION 17334760
AMAT 0040-60891 STOP, DOUBLE, WAFER LIFT
VARIAN COVER, ADJ BIAS FEEDTHRU E17183230
GEMU D-67133 VALVE, PNEUMATIC SWITCH
ULTRATECH 05-20-02729-02 SWITCH, X-LIMIT
NAGANO KEIKI KH15-A34 TRANSMITTER
VARIAN SEMICONDUCTOR 4278100 CUP, RETAINING
AMAT 02-81966-00 CASSETTE HOLDER HARNESS
AMAT 7 CABLE ASSY FARADAY & SOL
