美国MKS质量流量控制器  MKS 1559A大流量质量流量控制器

MKS 1559型质量流量控制器是专为通用的质量流量control applications covering the range from 20 slm (42.5 cfh) to 200 slm (425 cfh).1 The控制应用的覆盖范围从20 SLM（42.5上下）200 SLM（425比1）。Type 1559’s unique control valve eliminates oscillation and offers better response time as1559型的的控制阀消除振荡，并提供更好的响应时间compared to other flow controllers. This is possible through the use of a “balanced force”相比其他流量控制器。这是可能通过使用一个“平衡力”valve design that automatically neutralizes line pressure-induced imbalances within the阀门的设计，自动中和线压力引起的内部失衡control valve.控制阀。Important operational considerations include fast warm-up fast response time and 1% F.S.重要的操作因素包括快速热身，快速响应时间和1%的评论accuracy (Nitrogen). These features are key in minimizing downtime and ensuring the精度（氮）。这些功能键在*限度地减少停机时间和保证correct gas flow is being delivered to your process at the correct time.正确的气体流被送到你的过程，在正确的时间。The Type 1559 has excellent RFI protection and has a noise protection safety feature1559型具有优良的RFI保护，和有噪声的安全保护功能where the valve closes with a command signal of less than 0.2% of F.S. MKS also offers a在阀门关闭与小于0.2% F.S. MKS命令信号，还提供了一个complete line of compatible stand-alone power supply/readout units including Types 246兼容的完整，独立的电源/读出单元，包括类型246，247 and 647.247和647。

美国MKS质量流量控制器  MKS 1559A大流量质量流量控制器优势：

全尺寸范围从20到200的SLM SLM(nitrogen equivalent) for a wide variety of（氮当量）为各种各样的high flow applications高流量的应用

• “Balanced force” valve design to minimize

•平衡力阀设计*小化

oscillation due to line pressure

由于线的压力振荡

fluctuations

波动的

• Fast 30 minute warm-up time to minimize

•快30分钟的热身时间减少

expensive production downtime

昂贵的停机时间

• Fast 2 second settling time to achieve

•快2秒的时间来实现

desired flows quickly

所需的迅速流动

• Accepts an external pressure input signal

•接受外部压力输入信号

(0 - 10 VDC) to allow pressure control

（0 -10VDC）