美国MKS质量流量控制器 MKS 1479A系列全金属密封质量流量控制器
MKS 1479型是一种经济型金属密封质量流量控制器的设计measure and control the flow of gases in high purity applications. The Type 1479测量和控制应用的高纯度气体流量。1479型Mass-Flo® Controller is available with Full Scales from 10 sccm to 20 slm providing fast质量流量®控制器从10 sccm的20 slm的全尺度，提供快速的，repeatable flow control to as low as 0.2 sccm. The 1479 can also be used as a pressure可重复的流程控制到尽可能低为0.2 sccm的。1479也可以作为一个压力controller when connected to a suitable pressure transducer.当连接到一个合适的压力传感器，控制器。The 1479 is a direct form-fit-function replacement for the most common MFC’s on the1479是一个直接的形式拟合函数替换为*常见的MFC的研究market today. The standard 3-inch footprint enables the 1479 to drop directly into the same的市场。标准3英寸的足迹，使1479直接下降到相同的space without modifying existing gas lines. Electrical connectors are the same PC card无需修改现有的煤气管道空间。电连接器相同的PC卡edge or Type “D” connectors with the same pin-outs signals and functions as their industry边缘或类型的“D”连接器，具有相同的引脚输出，信号，和功能为业counterparts so no cable or connector rewiring is necessary. The 1479 is compatible with同行，所以没有电缆或连接器接是必要的。1479是兼容的MFC power supply and display electronics from MKS or other manufacturers.从MKS或者其他制造商的MFC的电源和电子显示屏。
美国MKS质量流量控制器 MKS 1479A系列全金属密封质量流量控制器优势：
满足工艺要求
• Patented1 sensor design provides
•patented1传感器的设计提供了exceptional zero stability特殊的零稳定性
• Full scale flow ranges from 10 sccm to
•满刻度流量范围从10 sccm的20 slm for precise and repeatable flow20 SLM和可重复的流程measurement and control测量和控制• Percent of full scale accuracy for1%的全尺寸精度analog configurations模拟的配置Robust Reliable Design强大的，可靠的设计
• Rigorous design and testing includes
•严谨的设计和测试包括MTBF analysis and STRIFE testing to故障分析和冲突检测ensure long-term performance确保长期性能
• <10 RA electropolish finish of wetted
•＜10 RA电解抛光完成的湿stainless surfaces cleanroom不锈钢表面，洁净室processing and use of
• CE Mark compliant – meets require
•CE标记兼容的–符合要求ments for European Union欧盟要求
• Two year warranty ensures quality
•二年保证质量and customer satisfaction和客户满意度
