FMA5420进口流量仪表FMA5420>
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FMA5420
电子质量流量计 质量流量控制器 FMA5400A and FMA5500A
Economical Gas Mass Controllers With or Without Integral Display
NIST Traceable Calibration
Reads and Controls Gas Mass Flow Without Temperature or Pressure Compensation
Available in Economical Aluminum or Corrosion-Resistant 316 SS
Tiltable LCD Display for Easy Reading
产品描述
The FMA5400A/5500A Series electronic gas mass flow controllers provide for controlling the flow of a wide variety of gases from 0-10 SCCM up to 100 SLM. Utilizing heat transfer through a heated tube to measure molecular gas flowrate, the FMA5400A/5500A provides measurement of direct gas mass flowrate, without the need to compensate for variations in gas temperature or pressure (within stated limits). They are available in an economical aluminum/brass construction for typical gas flows and a 316 SS construction for applications requiring more corrosion resistance. The FMA5400A series without integral display is supplied with both an analog 0-5 Vdc and 4 to 20 mA output for remote monitoring; the FMA5500A series has both an integral 3-1/2 digit display and analog output. The display is tiltable over 90 degrees for viewing convenience. The display is calibrated standard to read out directly in SCCM or SLM for nitrogen (other gas calibrations available on special order).
The FMA5400A/5500A mass flow controllers feature a built-in normally-closed electromagnetic valve for maintaining a constant flowrate regardless of variations in inlet or outlet pressures. The setpoint is controlled either locally via a potentiometer accessible through an access window in the case or remotely via an analog 0-5 Vdc or 4-20 mA signal (field selectable). The FMA5400A/5500A series require 12 to 26 Vdc power @ 800 mA maximum, which can be supplied by the FMA545PW wall plug-in socket power supply. The electronics are reverse polarity protected and have a resettable fuse. Model number FMA545C (supplied separately) provides a mating 15-pin “D” connector with 8 feet of shielded cable for accessing the analog output signals and power input connections. The LCD supplied with the FMA5500A series is connected to the lower electronics via a modular plug. The LCD can be remotely located by purchasing an FMA18RC remote cable assembly–you must then build your own assembly for panel mounting the LCD.
SPECIFICATIONS
Accuracy: ±1.5% FS, including linearity over 15 to 25°C (59 to 77°F) and
0.7 to 4.2 kg/cm2 (10 to 60 psia) ±3% FS for units ≥ 100 SLM from o to 20% of range.
Repeatability: ±0.5% of full scale
Temp Coefficient: 0.15% FS/°C
Pressure Coefficient: 0.01% FS per psi (0.07 bar)
Maximum Pressure Drop: 50 psid
Response Time: 5 seconds to within ±2% of set flow rate over 25 to FS
Max Gas Pressure: 70 kg/cm2 gage (1000 psig)(For units up to 100 SLM); 35 kg/cm2 gage (500 psig); 1.76 kg/cm (25 psig) optimum
Gas and Ambient Temp: 5 to 50°C (41 to 122°F)
Leak Integrity: 1 x 10-7 cc/sec of He max to outside environment
Materials in Fluid Contact:
Aluminum Models: Anodized aluminum, 316 SS, brass and FKM O-rings
Stainless Steel Models: 316 SS and FKM O-rings
Output Signal:
Linear 0 to 5 Vdc: 1000 Ω minimum load
4 to 20 mA: 50 to 500 Ω loop resistance, ±20 mV max noise
Transducer Power: 12 to 26 Vdc @ 800 mA standard Turndown Ratio: 40:1
Shipping Weight: 1.8 kg (4 lb)
Compliance: EN55011 class 1, class B; EN50082-1
Attitude Sensitivity: With horizontal flow path, no shift in calibration up to +20 degree pitch
Gas Relative Humidity: 0 to 70% RH
Min Pressure Drop
SLM ≤9 10-30 50 60-100 200 500 1000
psid 1. 15
产品编号 产品描述
Mass Flow Controllers with Display, Al/Br Body (Use Part Number Builder for 316 SS Construction)
FMA5502A 0 to10 SCCM
FMA5504A 0 to 20 SCCM
FMA5506A 0 to 50 SCCM
FMA5508A 0 to 100 SCCM
FMA5510A 0 to 200 SCCM
FMA5512A 0 to 500 SCCM
FMA5514A 0 to 1 SLM
FMA5516A 0 to 2 SLM
FMA5518A 0 to 5 SLM
FMA5520A 0 to 10 SLM
FMA5523A 0 to 15 SLM
FMA5524A 0 to 20 SLM
FMA5526A 0 to 30 SLM
FMA5527A 0 to 40 SLM
FMA5528A 0 to 50 SLM
FMA5540A 0 to 60 SLM
FMA5541A 0 to 80 SLM
FMA5542A 0 to 100 SLM
Mass Flow Controllers Without Display, Al/Br Body (Use Part Number Builder for 316 SS construction)
FMA5402A-ST 0 to 10 SCCM
FMA5404A-ST 0 to 20 SCCM
FMA5406A-ST 0 to 50 SCCM
FMA5408A-ST 0 to 100 SCCM
FMA5410A-ST 0 to 200 SCCM
FMA5412A-ST 0 to 500 SCCM
FMA5414A-ST 0 to 1 SLM
FMA5416A-ST 0 to 2 SLM
FMA5418A-ST 0 to 5 SLM
FMA5420A-ST 0 to 10 SLM
FMA5423A-ST 0 to 15 SLM
FMA5424A-ST 0 to 20 SLM
FMA5426A-ST 0 to 30 SLM
FMA5427A-ST 0 to 40 SLM
FMA5428A-ST 0 to 50 SLM
FMA5440A-ST 0 to 60 SLM
FMA5441A-ST 0 to 80 SLM
FMA5442A-ST 0 to 100 SLM
Accessories
Click to expand/minimize a list of what others bought with the
FMA545C FMA545C Female 15-pin D-connector w/8 ft shielded cable
Click to expand/minimize a list of what others bought with theFMA545PW FMA545PW
0
Socket plug-in power supply for 100 to 240 Vac
FMA545PW-220VAC
0
Socket plug-in power supply for 220 Vac, European plug type
FMA545C-10
0
Female 15-pin D-connector w/10 ft shielded cable
FMA545C-12
0
Female 15-pin D-connector w/12 ft shielded cable
FMA545C-18
0
Female 15-pin D-connector w/18 ft shielded cable
FMA545C-25
0
Female 15-pin D-connector w/8 ft shielded cable
Click to expand/minimize a list of what others bought with theFMA18RC10 FMA18RC10
0
10 ft Cable for remote LCD mounting
Click to expand/minimize a list of what others bought with theFMA18RC25 FMA18RC25
注: * Comes with ? FNPT connections instead of compression fittings. Comes complete with compression fittings, NIST certificate and operator’s manual.
Power supplies sold separately.
Flow ranges specified are for nitrogen or air at 20 psig inlet (up to 50 SLM) or 25 psig inlet (60 to 100 SLM units) and 0 psig outlet. When used with other gases, a multiplication factor is used to determine the flow rate, and the digital display must be rescaled in the field.
To request a custom calibration add the gas abbreviation and inlet pressure/outlet pressure as a suffix to the model number.
Calibration are done at ambient temperatures only, 21.1°C (70°F)
For oxygen cleaned units, add suffix “-C” to model number; add $125 to price.
(1) (2) (3) (4)
FMA A
Qty:
1
价格:
选项说明:
(1) Display 选项:
54 for without display
55 for with display
(2) Max Flow Rate 选项:
02 for 10 SCCM
04 for 20 SCCM
06 for 50 SCCM
08 for 100 SCCM
10 for 200 SCCM
12 for 500 SCCM
14 for 1 SLM
16 for 2 SLM
18 for 5 SLM
20 for 10 SLM
23 for 15 SLM
24 for 20 SLM
26 for 30 SLM
27 for 40 SLM
28 for 50 SLM
40 for 60 SLM
41 for 80 SLM
42 for 100 SLM
(3) Body 选项:
无（选项为空白） for aluminum/brass body
-ST for 316 SS body
(4) Oxygen Cleaned Units 选项:
无（选项为空白） for None
-C for Oxygen Cleaned Units
FMA5420
FMA5420进口流量仪表FMA5420
