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三、仪表的基本误差限与度等级
仪表在规定的参比工作条件下确定的误差称为基本误差。这里所谓的工作条件,是指仪表工作时所经受的条件包括环境压力、环境温度、电磁场、电源变化、重力、倾斜、辐射、冲击、振动等。在参比工作条件下,只允许工作条件在很窄的一定范围内变化,以至其对涸量的影响可忽略不计。
对于工业自动化仪表,常给出其基本误差的大允许值,亦即基本误差限。在正常工作条件下,气体检测仪测量范围内各处指示值的误差不应过此跟值。仪表的基本误差限是定员地描述仪表度的重要指标。
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AMAT XY Stage System, G3/LP with Controller 0190-a1411
VARIAN E11284500 UPGRADE KIT BEAMLINE W/ LEYBOLD PUMP
NOVA NOVASCAN 3000 CONTROL UNIT 315-4000-00 0500-00217
AMAT CONTROL UNIT HARDWARE 0500-00217
APPLIED MATERIALS (AMAT) PRE-ACCEL ASSY P/N 9090-00574
EDWARDS IBC DISPENSE MODULE P/N F33945100 REV 11
AMAT BOX, IBC DISPENSE BOX, ECP - SF3 0190-01599
DNS ROBOT, SK2000 2-39-82334 TS311-2008S
VARIAN VACUUM TURBO PUMP PFEIFFER TPH1001P E11080562
AMAT MEC ASSY DR300 f/Intel & R.O.W 0650-a0170
NOVA NOVASCAN 420 CONTROL UNIT - NEW
TEL (TOKYO ELECTRON) MB3M80-000978015 TRAP
APPLIED MATERIALS (AMAT) CHASSIS IHC DC DAQ QUANTUM 3
OERLIKON LEYBOLD PUMP, TURBO MAG W 1300 C 400110V0011
NOVELLUS SYSTEMS INC BELL JAR, SPEED 02-10387-01
AXCELIS 3-AXIS ROBOT 322703R 547932 REV D
LEYBOLD TURBO PUMP, TMP 1000C
AMAT IP 366MHz with S/W 4.2.400.2 for Intel 0090-a2280
STEAG ROBOT, Y-AXIS LEFT 00048929-00
STEAG ROBOT, Y-AXIS RIGHT 00048929-00
NSD SK2-- LSHAPED KAWASAKI 060053R0S1 2-39-68521
NOVELLUS BELL JAR NE HIGHPOWER 02-293756-00
COMDEL CLX-10K/CX-16P mstr-slave NOVELLUS 27-257659-00
APPLIED MATERIALS (AMAT) LASED PEDESTAL P/N 0040-60593
APPLIED MATERIALS (AMAT) UV RELAY ASSY P/N 0010-A7810
MRL CORE, BLACK MAX FURNACE HEATER ELEMENT 4600819112
VARIAN ASSY, ES GAS DRY E11054660 11054660
APPLIED MATERIALS (AMAT) DSG BOARD ASSY P/N 0195-01051
AMAT CHAS PLASMA FLOOD (AR) DC DAQ 9090-01181ITL
TEL (TOKYO ELECTRON) MB3M87-041637-11 COLUMN TRAP - NEW
APPLIED MATERIALS (AMAT) RTA PROBE ASSY P/N 0190-22676
APPLIED MATERIALS (AMAT) TEMP CONTROLLER P/N 0190-35798
AMAT DOOR POD OPENER 25 WAFER 0500-01087
DNS ELECT EEW UNIT, FULL ASSY SK2000 2-AE-J0184
NOVELLUS ASSY, LOADARM BOAT ROTATION ASM 2587998-01
KENSINGTON LAB NANO SPEC 9000i 7200-01084
AMAT HEATER, TIN 200MM 0010-18080
TEL (TOKYO ELECTRON) MB3S80-000332-11 DRIVE FEEDTHRU
APPLIED MATERIALS (AMAT) SHOWER HEAD P/N 0040-95444
AXCELIS NOVA WAFER HANDLER ASSY 8" CLASS 1 153-10000-04
APPLIED MATERIALS (AMAT) MEC2/L ASSEMBLY P/N 0090-A1671
BROOKS ASSY ROBOT ATR8 3FP NOVELLUS VCTR/WTSHV
SHIMADZU PUMP,TURBO TMP-2003LM-3
AMAT MOD ROBOT CONT GENCO 4 F 3680-A0141
APPLIED MATERIALS (AMAT) CATHODE LINER P/N 0041-05535
APPLIED MATERIALS (AMAT) IPU 2.5GHZ P/N 0090-A9920
AMAT WSI TARWSI2.7 5N 390/404MM X 8MMT FNQ-S41-000268A
APPLIED MATERIALS (AMAT) TARGET W SIP P/N 0190-17547
ADVANCED ENERGY PE-2500 GEN, RF1500W100KHZ 3157504-012C
DNS ASSY, SRHP LEFT SK2000 2-AE-J0261 1002AL SRHP
AMAT GEN, DUAL 13.56MHZ X 2MHZ, 1KW, 400VA 0190-23895
DNS ASSY, HP RIGHT SK2000 2-AE-J0132