YB560103-BL
YB560103-BL
YB560103-BL
在工业控制中，PID控制（比例-积分-微分控制）得到了广泛的应用，这是因为PID控制具有以下优点：
1）不需要知道被控对象的数学模型。实际上大多数工业对象准确的数学模型是无法获得的，对于这一类系统，使用PID控制可以得到比较满意的效果。据日本统计，目前PID及变型PID 约占控制回路数的90%左右。
2）PID控制器具有典型的结构，程序设计简单，参数调整方便。
3）有较强的灵活性和适应性，根据被控对象的具体情况，可以采用各种PID控制的变种和改进的控制方式，如 PI、PD、带死区的PID、积分分离式PID、变速积分PID等。随着智能控制技术的发展，PID控制与模糊控制、神经网络控制等现代控制方法相结合，可以实现PID控制器的参数自整定，使PID控制器具有经久不衰的生命力。
※： ※ 公司
ASML 4022.436.2693 Module Board SVG Motion Controller
NEW LAM 7 Lower Electrode 8” 4 pin Etch
ASML /SVG 4022.454.6940 ESA-X1
ASML/SVG 4022.431.20761 Cold Light Mirror 365
Eastern Air Brushless DC Motor DB31D-54
Novelis CU, GAARD ARM, DELRIN, DOGLEG
Omron R88DUA20V AC Servo Drive with cables
ASML 4022.456.39541 8” Wafertable Cont. Clamp Flat
Motor Baugrobe 4300 Version 2.2
Ultratech item 0180502-3-01 PHD Inc.
ASML/SVG 4022.456.07242 8” Wafertable C.C. Flat TIN SSP
VAT Pneumatic Rectangular Gate Valve F02-76569-01
ASM Mass Flow Controller (MFC) AFC-202
National Instruments AT-MIO-64F-5 Analog/Digital PC
MKS 153D-20-40-2 Control Valve
New ASM Kit-Internal Assy-4.00 PNEU Valve 50-110109A67
MKS Instruments 153D-26356 3 inch Throttle Valve
MKS Instruments 153D-26356 3 inch Throttle Valve
New HVA 13210-0153R-2 ASM 50-122938A11
MKS 621C01TDFHC Remote Transducer
OME 40 C1 W/Cartridge 068778
MKS Instruments 153D-26353 2 inch Throttle Valve
Tylan / Millipore FC-2960M Mass Flow Controller NEW
New Pacific Scientific Brushless Servo motor RS32SSNA
BOC Edwards High Vacuum Int. D37208800
Iwaki Bellows pump FF-10BT2
Pacific Ozone Technology Model 01 Ozone Gas Generator
Tescom 49-332-060 70-125 PSI Actuation Normally Closed
Tescom 49-332-060 70-125 PSI Actuation Normally Closed
ASML 4022.436.0612 Prealignment Unit
Sanyo MIR-262 incubator
Loop Internal Ant. 11455-2 Global Systems
New Aera FC-D980C Mass Flow Controller 500 SCCM SIH4
Unit Instruments UFC-8100 Mass Flow Controller N2
Donaldson Part #P510172 Compresses Ambiant Air Filter
Omron AC Servo Drive R88D-UA12V 200v
AMAT Part 0100-90286 Applied Material Beam Profiler
AMAT Part Number 0100-00828 Applied Material Vibration
AMAT Part Number 0100-00860 Beam Stability Monitor
AMAT Part Number 0100-00929 I/V Converter-Beam Profile
AMAT Part Number V 1A Power Supply
AMAT Part Number 0100-91105 I/V Converter Power Supply
Semiconductor Systems 09-04352,PB 146298,09-04393-B Bo
AMAT Part Number 0100-90870 4 Phase Stepper Controller
Leybold-Heraeus NIZ 2 Power Supply
Varian MAT 25649/039 Power Supply
Tokyo Electron CVD/Etch Reactor Interface 2 Analogic
Tokyo Electron WZ81-000694-1 PCM Valve Drive
Tokyo Electron Transport Gas Panel Interface Analogic
Tokyo Electron CVD/Etch Reactor Interface 2 Analogic
Tokyo Electron CVD/Etch Reactor Interface 1 Analogic
Tokyo Electron CVD/Etch Gas Panel Interface Analogic
ASML 4022.431.2340 Spacer Block Tilting Lens
AMAT Applied Materials Motorola MVME211 0100-11030
ASML/SVG 4022.471.6177 ProDrive Power Supply PADC 65/13
Western Atlas INT Assy D 155562
Western Atlas INT Assy D 155567
Western Atlas INT Assy D 155568
Verteq Process System Division SW800-C1-E2
