DSQC 249B/3HAA3563-AHA/1
DSQC 249B/3HAA3563-AHA/1
DSQC 249B/3HAA3563-AHA/1
有了上述过程，用PLC实现控制显然是可能的。因为：有了输入刷新，可把输入电路监视得到的输入信息存入PLC的输入映射区；经运行用户程序，输出映射区将得到变换后的信息；再经输出刷新，输出锁存器将反映输出映射区的状态，并通过输出电路产生相应的输出。又由于这个过程是永不停止地循环反复地进行着，所以，输出是反映输入的变化。只是响应的时间上，略有滞后。但由于PLC的工作速度很快，所以，这个“略有滞后”的时间是很短的，一般也就是几毫秒、几十毫秒，多也不会过100到200毫秒。
图2a所示的是简化的过程，实际的PLC工作过程还要复杂些。除了I/O刷新及运行用户程序，还要做些其它的公共处理工作。公共处理工作有：循环时间监视、外设服务及通讯处理等。
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Mitsubishi Sinchoon Turbopump FT-2300M-W1K1 untested
CTI Cryogenics On-Board P300 Cryopump 0190-27355 new
Shimadzu Vacuum Turbopump TMP-3403LMTC need rebuild
Shimadzu Vacuum Turbopump TMP-3403LMC need rebuild
AE Navigator RF Match 3155169-009C new 0190-23122
AE Navigator RF Match 3155126-009D refurb 0190-27577
AMAT XR80 Implanter Exchange Arm 9010-00672 ITL
Daikin Multi Loop Heat Exchanger Chiller TWR200A4 new
Komatsu Heat Exchanger AKX-3000-V AMAT 3380-00034 new
Nikon Scanner Prism Unit 4L990-797AN working
Nikon S306 Depolarizer 4L991-783AN new
Kawasaki Robot Slave Controller C61D-A002 0190-05092
Kawasaki Slave Robot Controller C61C-A002 new
AE Navigator RF Match 3155126-018B refurbished
CTI-Cryogenics High Capacity Compressor 8128903G004
Osaka Vacuum Turbopump Set TH542, TH532ASAW
AMAT Ion Source Indirectly Heated Cathode 0011-92437
Varian TV 301 Vacuum Turbopump 7698918 new
TEL ACT 12 DC Power Supply TDK MSE181E working
TEL ACT 8 DC Power Supply TDK MSE343B working
AE E'Wave Bipolar DC Power Supply 3152603-014D
Manifold Indexer Assy. SX6082 AMAT XR80 0520-90006
Yaskawa 300mm Prealigner XU-ACP130-B11 new
Agilent Logic Analysis System 16702B
Yaskawa Dual Arm Trnsfr Robot XU-RCM7220 new 0190-25393
KLA-Tencor AIT 2 Optics Module 0099610-000 untested
KLA-Tencor 2139 Software v5.3.49 Standard 0027325-000
Brooks Genus InCooler Cooling Station 001-4700-17
Brooks InLigner Aligner Station 001-2980-69 working
ENI DCG-200 DC Power Supply Set DCG-200Z 60kW new
TDK TEL ACT 12 DC Backup Module MSE181D
Varian TV 1001 Navigator Turbopump 9698930M001 untested
AE Pinnacle DC Power Supply 3152412-234D 0190-24497
AE Pinnacle DC Power Supply 3152412-234F new 0190-24497
ENI DCG-200 DC Supply 40kW DCG-200Z Refurb 0190-08033
Brooks Series 8 Robot Controller 108358 working
CTI-Cryogenics IS-1000 Compressor 8135928G001 untested
CTI-Cryogenics On-Board P300 Cryopump 0190-27350
CTI-Cryogenics On-Board P300 Cryopump 8116476G002
Neslab DI Max DEI Water To Water Cooler Chiller new
ENI Spectrum RF Generator B-5002 0190-15320
ENI Spectrum RF Generator B-5002 working 0190-15320
AE RFPP RF25M RF Generator 3150048-000
AE RF25M 2500W RF Generator 3150048-004B
AE Ovation RF Generator 3150861-002D 0190-27049
Nikon 4S587-668 Linear Motor Controller CLSR-0420-N2CD
Nikon 4S587-666 Linear Motor Controller CLSR-4590-N2CG
Oerlikon P1264 Stroke Cylinder 102078752 new
ENI Spectrum B-5002 RF Generator 0190-15320
Matrix Ind Chem Bath/Fume Hood I98BD/H-ASSY + Aquasonic
ENI DCG-200 DC Power Supply Slave DCG-200Z 0190-07969
Nova NovaScan 840 210-48000-01 New 0650-01111
Nova NovaScan 420 210-48000-01 New 0650-01111
Hitachi 3-845612 Kyoto Denkiki KDS-20170S Power Supply
Hitachi DC Power Generator 3-821755-2 New
AE AZX63 Automatch RF Match 3155031-023A refurb
Lam 200mm Chamber 853-073087-600-A-262 working
Asyst SMIF Reticle Indexer R-01 Rev.J new
Asyst Reticle SMIF Indexer R150 new 9700-4314-01 Rev.E
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Leybold Inficon Gas Analyzer Transpector CIS 2
Varian TV 300HT Vacuum Turbopump 9699037S008 new
Nikon SPA431B Linear Motor Controller 4S587-241
MicroVision 200mm Wafer Sorter MVT 7080 Sorter working
Varian TV 250 Vacuum Turbopump 9699007S024 refurbished
ENI DCG-200E DC Power Supply Slave 0190-22935 new
ASML Twinscan BP Mirror 193NM 4022.454.9932.2 new
AMAT XR80 Implanter Gas Interface 0090-91890ITL
Seiko Seiki Vacuum Turbopump STP-301 New
Lucas Labs CAT Process Chamber Assurance Tool
AMAT XR80 Implanter Gas Interface 0090-91819 ITL
AMAT XR80 Implanter Gas Interface 0090-91890 ITL
Nicolet ECO 1000S Metrology Tool untested
AE Apex 5513 RF Generator 5.5kW
Leybold Vacuum Turbopump Turbovac 1000 C working
Lam OnTrak DSS200 Wafer Scrub Input Station 12-8892-084
Nikon Optistation 3 Wafer Loader Assembly
