1794-IV16
1794-IV16
1794-IV16
为了减少动力电缆辐射电磁干扰，尤其是变频装置馈电电缆。笔者在某工程中，采用了铜带铠装屏蔽电力电缆，从而降低了动力线生产的电磁干扰，该工程投产后取得了满意的效果。
不同类型的信号分别由不同电缆传输，信号电缆应按传输信号种类分层敖设，严禁用同一电缆的不同导线同时传送动力电源和信号，避免信号线与动力电缆靠近平行敖设，以减少电磁干扰。
3、 硬件滤波及软件抗如果措施
由于电磁干扰的复杂性，要根本消除迎接干扰影响是不可能的，因此在PLC控制系统的软件设计和组态时，还应在软件方面进行抗干扰处理，进一步提高系统的可靠性。常用的一些措施：数字滤波和工频整形采样，可有效消除周期性干扰；定时校正参考点电位，并采用动态零点，可有效防止电位漂移；采用信息冗余技术，设计相应的软件标志位；采用间接跳转，设置软件陷阱等提高软件结构可靠性。
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Varian Turbo-V 1800 Vacuum Turbopump 9699061S001
Seiko Seiki TMP Controller STP SCU-H1000C 0190-01036
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Yaskawa ServoPack Motor Driver 200V SGDH-75AE
Ebara Vacuum Turbopump ET600WS need
KLA-Tencor NEAT CRS1010 200mm Wafer Stage Controller
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Newport 300mm Wafer Robot 5 0190-19124CW
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AE Ovation 35162 RF Generator 3150861-002B 0190-16109
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Shimadzu 20M 90 Deg Turbopump Cable Set 262-78462-56V1
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Yaskawa 8-Axis Motion Controller SMC 2000-8DM
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Nikon NSR-S202A 200mm Wafer Handler Prealigner
NovaScan 420 Nova Applied Materials AMAT NOVA 840
Daikin Heat Exchanger Brine Chiller Unit TBR15AMX
ASML 200mm Stepper DSC 7911 PCB 6810116041
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ASML Stepper Library Brake 851-0618-003
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THK Assembly, Z-Slide Slim Cell, SC ECP 0190-138170
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AE Remote Plasma Source Gen. 3151801-003A 0190-08638
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LAM Research Wafer Lifter 853-051252R001
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Hitachi M-308ATE Taitec Heat Exchanger CH-400AHS-M0
AMAT XR80 Implanter Chamber Vacuum Cont 9090-00479ITL
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Tokyo Electron Limited Upper Y(Hand) Electrode New
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AE MDX-L6 DC Power Supply 3152343-000A 0190-76190
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LAM 4420 Etcher Ergo Loader Left
Asyst Load Port 300FL, S2.1HAMA/E-84 9700-6149-01
Anelva Motor Control Unit A A12-05110
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Lam Drive Arm Assy. 853-012123-001-H-230S
