产品简介:
性能参数:
抽气速度(50/60Hz)Pumping Speed(50/60Hz)
25000/30000 l/min
1500/1800 m3/h
883/1060 CFM
极限压力(Ultimate Pressure)
≤7.5x10-4 Torr
≤1.0x10-3 mbar
≤1.0 Pa
水冷密封马达(Canned Motor)
频率 Frequency
50/60 Hz
电压Voltage
220~440 V
额定功率Rated Power
6+6/4.47+4.47 HP/Kw
连接口(Connection)
进气口 Inlet
ISO160(bolted)
排气口 Outlet
NW40
水 Cooling Water
压力 Pressure
2.0~4.0 kg/cm2
流量 Min. Flow
3L/min 15℃
温度 Temp.
7L/min 30℃
接头 Connection
RC3/8"
氮气 N2
压力 Pressure
0.15~0.2 Mpa
稀释流量 Dilute Flow
0~60 L/m![]() |
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| 型号:JX213600RSE602干式螺杆真空泵 | 型号:JX213603RSE80干式螺杆真空泵 | 型号:JX213597RSE1802干式螺杆真空泵 |

|
抽气速度(50/60Hz)Pumping Speed(50/60Hz) |
8300/10000 l/min | |
| 500/600 m3/h | ||
| 294/353 CFM | ||
| 极限压力(Ultimate Pressure) | ≤7.5x10-4 Torr | |
| ≤1.0x10-3 mbar | ||
| ≤1.0 Pa | ||
| 水冷密封马达(Canned Motor) | 频率 Frequency | 50/60 Hz |
| 电压Voltage | 220~440 V | |
| 额定功率Rated Power | 4.0+4.0/2.98+2.98 HP/Kw | |
| 连接口(Connection) | 进气口 Inlet | ISO100(bolted) |
| 排气口 Outlet | NW40 | |
| 水 Cooling Water | 压力 Pressure | 2.0~4.0 kg/cm2 |
| 流量 Min. Flow | 3L/min 15℃ | |
| 温度 Temp. | 7L/min 30℃ | |
| 接头 Connection | RC3/8" | |
| 氮气 N2 | 压力 Pressure | 0.15~0.2 Mpa |
| 稀释流量 Dilute Flow | 0~60 L/min | |
| 密封流量 Sealing Flow | 0~20 L/min | |
| 接头 Connection | Swagelok 1/4" | |
| 尺寸 Dimension | 长x宽x高 | 814x380x915 mm |
| 重量 Weight | 450 Kg | |
| 噪音 Noise | <70 dB(A) | |
| 控制介面 Control | SEMI E73-0299 | |
| 系统*漏率 System Max. Leak-rate | 1.0/10-5 mbar.l/s | |
| 室温操作范围 Operation Temp. | 5℃~40℃ | |
| 操作湿度 Operation Moisture | 90%以下 | |

|
抽气速度(50/60Hz)Pumping Speed(50/60Hz) |
1300/1600 l/min | |
| 80/96 m3/h | ||
| 47/57 CFM | ||
| 极限压力(Ultimate Pressure) | ≤7.5x10-3 Torr | |
| ≤1.0x10-2 mbar | ||
| ≤1.0 Pa | ||
| 水冷密封马达(Canned Motor) | 频率 Frequency | 50/60 Hz |
| 电压Voltage | 220~440 V | |
| 额定功率Rated Power | 4/2.98 HP/Kw | |
| 连接口(Connection) | 进气口 Inlet | NW50 |
| 排气口 Outlet | NW40 | |
| 水 Cooling Water | 压力 Pressure | 2.0~4.0 kg/cm2 |
| 流量 Min. Flow | 3L/min 15℃ | |
| 温度 Temp. | 7L/min 30℃ | |
| 接头 Connection | RC3/8" | |
| 氮气 N2 | 压力 Pressure | 0.15~0.2 Mpa |
| 稀释流量 Dilute Flow | 0~60 L/min | |
| 密封流量 Sealing Flow | 0~20 L/min | |
| 接头 Connection | Swagelok 1/4" | |
| 尺寸 Dimension | 长x宽x高 | 814x380x663 mm |
| 重量 Weight | 280 Kg | |
| 噪音 Noise | <68 dB(A) | |
| 控制介面 Control | SEMI E73-0299 | |
| 系统*漏率 System Max. Leak-rate | 1.0/10-5 mbar.l/s | |
| 室温操作范围 Operation Temp. | 5℃~40℃ | |
| 操作湿度 Operation Moisture | 90%以下 | |

|
抽气速度(50/60Hz)Pumping Speed(50/60Hz) |
25000/30000 l/min | |
| 1500/1800 m3/h | ||
| 883/1060 CFM | ||
| 极限压力(Ultimate Pressure) | ≤7.5x10-4 Torr | |
| ≤1.0x10-3 mbar | ||
| ≤1.0 Pa | ||
| 水冷密封马达(Canned Motor) | 频率 Frequency | 50/60 Hz |
| 电压Voltage | 220~440 V | |
| 额定功率Rated Power | 6+6/4.47+4.47 HP/Kw | |
| 连接口(Connection) | 进气口 Inlet | ISO160(bolted) |
| 排气口 Outlet | NW40 | |
| 水 Cooling Water | 压力 Pressure | 2.0~4.0 kg/cm2 |
| 流量 Min. Flow | 3L/min 15℃ | |
| 温度 Temp. | 7L/min 30℃ | |
| 接头 Connection | RC3/8" | |
| 氮气 N2 | 压力 Pressure | 0.15~0.2 Mpa |
| 稀释流量 Dilute Flow | 0~60 L/min | |
| 密封流量 Sealing Flow | 0~20 L/min | |
| 接头 Connection | Swagelok 1/4" | |
| 尺寸 Dimension | 长x宽x高 | 920x430x1030 mm |
| 重量 Weight | 545 Kg | |
| 噪音 Noise | <70 dB(A) | |
| 控制介面 Control | SEMI E73-0299 | |
| 系统*漏率 System Max. Leak-rate | 1.0/10-5 mbar.l/s | |
| 室温操作范围 Operation Temp. | 5℃~40℃ | |
| 操作湿度 Operation Moisture | 90%以下 | |
