5SHY35L4520 ABB

5SHY35L4520 ABB

5SHY35L4520 ABB  Machine Edition支持数组和混合结构的变量5SHY35L4520 ABB。变量表可以被输出到多种格式的文件或从这些文件中导入，例如你可以用Excel来编辑，

然后导入到Machine Edition的变量表中。Logic Developer - PLC中使用到的变量，同时也可以被CIMPLICITY View所浏览。下图就是典型的变量属性编辑窗口。

LAM 4420 Etcher Inner Gate Valve Drive 853-012200-002

Recif SA Wafer Sorter/Handler Computer ECUA00002 AS-IS

LAM 4420 Etcher Inner Door Actuator 853-012200-R002

Olympus Microscope Objective MDPlan 150 

Lam Solenoid Interlock Board 810-17004-001 

Allen-Bradley Circuit Breaker 140U-J2 140U-J-GFP1503

Allen-Bradley Circuit Breaker 140U-J2 140U-J-GFP1503

ASML Exciter Lamp XP Power 859-0515-006-A 

Nikon Stage Interface PCB 4S003-057-STG-I?/F1 

KLA-Tencor Housekeeping Control 0075164-002 

TEL Depo Shutter y. Y-AL 3D10-101277-V2

Kawasaki Robot End Effector 50480-76

Hitachi S-9300 SEM EVAC Control Panel 569-5518 

AMAT Spliced O-Rings 300mm 0190-15796  of 9

LAM 4420 Etcher Anafaze Controller 11235-50 

LAM 4420 Etcher Heartbeat PCB 810-17012-002 

Hitachi S-9300 SEM EVAC Control Panel EVPANEL3 569-5518

AMI Power Supply P1183-208/208  0190-76273

Panasonic Servo Drive ADKA500BPFADH 

Panasonic Servo Drive ADKA400BPFADI 

Pentagon Tech. Endura PVD Quartz Bell Jar PT-0643-0013 

Wafer Identification Process Module 4500173313 

Cybor Pneumatic Interface Control Module ADS660-00

Merlin Gerin Circuit Breaker NSF150N 0680-01080

Dwyer Visi-Float Flowmeter VFC-151 

Parker Pressure Regulator PR-3-5168-2 

TEL Tokyo Electron Shield WZ10-102823-11 X4